CLASSIFICATION OF MICROMECHANICAL ELEMENTS AND FABRICATION OF BEAM-TYPE MICROMECHANICAL ELEMENTS. ENVIRONMENT. TECHNOLOGY. RESOURCES. Proceedings of the International Scientific and Practical Conference, [S. l.], v. 4, p. 289–296, 2025. DOI: 10.17770/etr2025vol4.8396. Disponível em: https://archive-journals.rtu.lv/etr/article/view/5244.. Acesso em: 11 mar. 2026.